Nanoelectromechanical systems

Overview

Works:	4 works in 4 publications in 4 languages

Titles

Fundamentals of microfabrication and nanotechnology by: (Language materials, printed)

Intracorporeal robotics : from milliscale to nanoscale by: (Language materials, printed)

Emerging nanoelectronic devices by: (Language materials, printed)

Nanoscale silicon devices by: (Language materials, printed)

Subjects

TK7875

620/.5

629.892

621.381

TK7874.84

Robotics