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Fundamentals of microfabrication and...

Madou, Marc J.

Fundamentals of microfabrication and nanotechnology

紀錄類型:	書目-語言資料,印刷品 : 單行本
作者:	MadouMarc J.,
出版地:	Boca Raton, FL
出版者:	CRC Press;
出版年:	c2012
版本:	3rd ed.
面頁冊數:	3 v.ill. (some col.) : 29 cm.;
標題:	Microelectromechanical systems -
標題:	Microfluidics -
標題:	Nanoelectromechanical systems -
標題:	Solid-state physics -
附註:	Includes bibliographical references and indexes
摘要註:	"In Solid State Physics, Fluidics and Analytical Techniques in Micro- and Nanotechnology we lay the foundations for a qualitative and quantitative theoretical understanding of micro-and nano-electromechanical systems, i.e., MEMS and NEMS. In integrated circuits (ICs), MEMS and NEMS, silicon (Si) is still the substrate and construction material of choice"--Provided by publisher
ISBN:	978-1-4200-5519-1
內容註:	v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology v. 2. Manufacturing techniques for microfabrication and nanotechnology v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications

Fundamentals of microfabrication and nanotechnology
Madou, Marc J.

Fundamentals of microfabrication and nanotechnology / Marc J. Madou - 3rd ed.. - Boca Raton, FL : CRC Press, c2012. - 3 v. ; ill. (some col.) ; 29 cm..
v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology.
Includes bibliographical references and indexes.
ISBN 978-1-4200-5519-1ISBN 978-1-4200-5511-5ISBN 978-1-4200-5516-0ISBN 1-4200-5519-4ISBN 1-4200-5511-9ISBN 1-4200-5516-X
Microelectromechanical systemsMicrofluidicsNanoelectromechanical systemsSolid-state physics

Fundamentals of microfabrication and nanotechnology
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330 $a "In Solid State Physics, Fluidics and Analytical Techniques in Micro- and Nanotechnology we lay the foundations for a qualitative and quantitative theoretical understanding of micro-and nano-electromechanical systems, i.e., MEMS and NEMS. In integrated circuits (ICs), MEMS and NEMS, silicon (Si) is still the substrate and construction material of choice"--Provided by publisher
330 $a "Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download, along with a solutions manual for qualifying instructors"--Provided by publisher
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