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Fundamentals of microfabrication

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Madou, Marc J.

Fundamentals of microfabrication

Record Type:	Language materials, printed : monographic
Author:	MadouMarc J.,
Place of Publication:	Boca Raton, Fla.
Published:	CRC Press;
Year of Publication:	c1997
Description:	589 p., [22] p. of platesill. (some col.) : 29 cm.;
Subject:	Microelectronics - Design and construction -
Subject:	Machining -
Subject:	Microelectronic packaging -
Subject:	Lasers - Industrial applications -
ISBN:	0-8493-9451-1

Fundamentals of microfabrication
Madou, Marc J.

Fundamentals of microfabrication = : / Marc Madou ; - Boca Raton, Fla. : CRC Press, c1997. - 589 p., [22] p. of plates ; ill. (some col.) ; 29 cm..
Includes bibliographical references (p. 565-569) and index.
ISBN 0-8493-9451-1
MicroelectronicsMachiningMicroelectronic packagingLasers -- Design and construction -- Industrial applications

Fundamentals of microfabrication
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210 $a Boca Raton, Fla. $c CRC Press $d c1997
215 1 $a 589 p., [22] p. of plates $c ill. (some col.) $d 29 cm.
320 $a Includes bibliographical references (p. 565-569) and index
606 $a Microelectronics $x Design and construction $2 lc $3 74038
606 $a Machining $2 lc $3 74039
606 $a Microelectronic packaging $2 lc $3 72638
606 $a Lasers $x Industrial applications $2 lc $3 66266
676 $a 621.38152 $b M183
700 1 $a Madou $b Marc J. $3 74037
801 0 $a cw $c 19990712 $g AACRII

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