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Physics of radio-frequency plasmas

Braithwaite, Nicholas

Physics of radio-frequency plasmas

紀錄類型:	書目-語言資料,印刷品 : 單行本
作者:	ChabertPascal, 1969-
其他作者:	BraithwaiteNicholas,
出版地:	Cambridge
出版者:	Cambridge University Press;
出版年:	2011
面頁冊數:	viii, 385 p.ill. : 26 cm.;
標題:	Low temperature plasmas -
標題:	Radio frequency -
電子資源:	http://assets.cambridge.org/97805217/63004/cover/9780521763004.jpg
附註:	Includes bibliographical references and index
摘要註:	"Low-temperature radio-frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on physics, this book will interest graduate students and researchers in applied physics and electrical engineering. The book incorporates a cutting-edge perspective on RF plasmas. It also covers basic plasma physics, including transport in bounded plasmas and electrical diagnostics. Its pedagogic style engages readers, helping them to develop physical arguments and mathematical analyses. Worked examples apply the theories covered to realistic scenarios, and over 100 in-text questions let readers put their newly acquired knowledge to use and gain confidence in applying physics to real laboratory situations"--Provided by publisher
ISBN:	978-0-521-76300-4
內容註:	Machine generated contents note: 1. Introduction; 2. Plasma dynamics and equilibrium; 3. Bounded plasmas; 4. Radiofrequency sheaths; 5. Single frequency capacitively-coupled plasmas; 6. Multi-frequency capacitively-coupled plasmas; 7. Inductively-coupled plasmas; 8. Helicon plasmas; 9. Real plasmas; 10. Electrical measurements; Index

Physics of radio-frequency plasmas
Chabert, Pascal

Physics of radio-frequency plasmas / Pascal Chabert, Nicholas Braithwaite - Cambridge : Cambridge University Press, 2011. - viii, 385 p. ; ill. ; 26 cm..
Machine generated contents note: 1. Introduction; 2. Plasma dynamics and equilibrium; 3. Bounded plasmas; 4. Radiofrequency sheaths; 5. Single frequency capacitively-coupled plasmas; 6. Multi-frequency capacitively-coupled plasmas; 7. Inductively-coupled plasmas; 8. Helicon plasmas; 9. Real plasmas; 10. Electrical measurements; Index.
Includes bibliographical references and index.
ISBN 978-0-521-76300-4ISBN 0-521-76300-2
Low temperature plasmasRadio frequency

Braithwaite, Nicholas

Physics of radio-frequency plasmas
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200 1 $a Physics of radio-frequency plasmas $f Pascal Chabert, Nicholas Braithwaite
210 $a Cambridge $a New York $c Cambridge University Press $d 2011
215 1 $a viii, 385 p. $c ill. $d 26 cm.
300 $a Includes bibliographical references and index
327 0 $a Machine generated contents note: 1. Introduction; 2. Plasma dynamics and equilibrium; 3. Bounded plasmas; 4. Radiofrequency sheaths; 5. Single frequency capacitively-coupled plasmas; 6. Multi-frequency capacitively-coupled plasmas; 7. Inductively-coupled plasmas; 8. Helicon plasmas; 9. Real plasmas; 10. Electrical measurements; Index
330 $a "Low-temperature radio-frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on physics, this book will interest graduate students and researchers in applied physics and electrical engineering. The book incorporates a cutting-edge perspective on RF plasmas. It also covers basic plasma physics, including transport in bounded plasmas and electrical diagnostics. Its pedagogic style engages readers, helping them to develop physical arguments and mathematical analyses. Worked examples apply the theories covered to realistic scenarios, and over 100 in-text questions let readers put their newly acquired knowledge to use and gain confidence in applying physics to real laboratory situations"--Provided by publisher
606 $a Low temperature plasmas $2 lc $3 274372
606 $a Radio frequency $2 lc $3 73048
676 $a 621.044 $v 22
680 $a TA2020 $b .C43 2011
700 1 $a Chabert $b Pascal $f 1969- $3 274370
702 1 $a Braithwaite $b Nicholas $g Nicholas St. J. $3 274371
856 4 $3 Cover image $u http://assets.cambridge.org/97805217/63004/cover/9780521763004.jpg