以電子迴旋共振化學氣相沉積法沉積類鑽薄膜之研究
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| Works: | 1 works in 1 publications in 1 languages | |
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Titles
以電子迴旋共振化學氣相沉積法沉積類鑽薄膜之研究 = A Study of Diamond-like Carbon Films Deposited by Electron Cyclotron Resonance Chemical Vapor Deposition
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