含鋯和氮類鑽碳薄膜之微鑽針高速鑽削性能及微孔品質研究

含鋯和氮類鑽碳薄膜之微鑽針高速鑽削性能及微孔品質研究 = The study of high speed micro-drilling performance and hole quality of diamond-like carbon coatings by doping with zirconium and nitrogen by: (Language materials, printed)

含鋯和氮類鑽碳薄膜之微鑽針高速鑽削性能及微孔品質研究